CARL ZEISS MICROELECTRONIC SYSTEMS GMBH
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Aug 02, 2005 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 68 Total Citation Count
- Jun 26, 2002 Earliest Filing
- 9 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
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Recent Publications
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Recent Patents
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Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
6894837 Imaging system for an extreme ultraviolet (EUV) beam-based microscopeExpiredJul 24, 03May 17, 05[G02B]
2004/0179,364 Array for reducing the coherence of a coherent radiation beamAbandonedMay 04, 04Sep 16, 04[F21V]
2004/0145,804 Microscope lens and the use of a microscope lens of this type in a microscopeAbandonedMar 18, 04Jul 29, 04[G02B]
2004/0012,847 Displaceable optics in microscope illumination, particularly displaceable collectorAbandonedJul 09, 03Jan 22, 04[G02B]
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