BROOKS AUTOMATION (GERMANY) GMBH
Patent Owner
Stats
- 3 US PATENTS IN FORCE
- 3 US APPLICATIONS PENDING
- Mar 20, 2018 most recent publication
Details
- 3 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 27 Total Citation Count
- May 12, 2011 Earliest Filing
- 0 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2016/0296,983 RECIRCULATION SUBSTRATE CONTAINER PURGING SYSTEMS AND METHODSApr 11, 16Oct 13, 16[H01L, B08B]
Recent Patents
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Title
Filing Date
Issue Date
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Expired/Abandoned/Withdrawn Patents
- No Patents to Display
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