BEIJING U-PRECISION TECH CO., LTD.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 2102

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9904183 Coarse motion and fine motion integrated reticle stage driven by planar motorApr 17, 15Feb 27, 18[G03F]
9791789 Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motorApr 17, 15Oct 17, 17[G03F]

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