Aplex Group

Patent Owner

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
 
 
B24B MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING 264

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6080040 Wafer carrier head with inflatable bladder and attack angle control for polishingNov 05, 97Jun 27, 00[B24B]
5934974 In-situ monitoring of polishing pad wearNov 05, 97Aug 10, 99[B24B]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
5980368 Polishing tool having a sealed fluid chamber for support of polishing padExpiredNov 05, 97Nov 09, 99[B24B]

Top Inventors for This Owner

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