Advanced Mirco-Fabrication Equipment Inc, Shanghai
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 1 US APPLICATIONS PENDING
- Jan 22, 2015 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 6 Total Citation Count
- Mar 21, 2013 Earliest Filing
- 1 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
- No Technology to Display
Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2015/0024,330 APPARATUS AND METHOD FOR CONTROLLING HEATING OF BASE WITHIN CHEMICAL VAPOUR DEPOSITION CHAMBERMar 21, 13Jan 22, 15[C23C, F27D]
Recent Patents
- No Recent Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2014/0083,613 GAS SUPPLY DEVICE FOR A VACUUM PROCESSING CHAMBER, METHOD OF GAS SUPPLYING AND SWITCHINGAbandonedSep 18, 13Mar 27, 14[G05D]
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