Advanced Micro-Fabrication Equipment, Inc.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 1100
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 1127

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9382619 Cleaning apparatus and method, and film growth reaction apparatus and methodApr 05, 12Jul 05, 16[C23C]
9230781 Capacitive-coupled plasma processing apparatus and method for processing substrateAug 01, 12Jan 05, 16[H01J, H05H]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2007/0166,459 Assembly and method for delivering a reactant material onto a substrateAbandonedFeb 23, 06Jul 19, 07[C23C]

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