Accretech USA, Inc.

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2009/0122,304 Apparatus and Method for Wafer Edge Exclusion MeasurementAbandonedAug 08, 08May 14, 09[H05B, G01N]
2009/0116,727 Apparatus and Method for Wafer Edge Defects DetectionAbandonedAug 08, 08May 07, 09[G06K]
7508504 Automatic wafer edge inspection and review systemExpiredAug 09, 07Mar 24, 09[G01N]
2008/0190,558 Wafer processing apparatus and methodAbandonedJul 06, 07Aug 14, 08[H01L]
2008/0017,316 Clean ignition system for wafer substrate processingAbandonedJul 06, 07Jan 24, 08[F23Q, C23F]
2008/0010,845 Apparatus for cleaning a wafer substrateAbandonedJul 06, 07Jan 17, 08[H01L, G06F, G01C, G01D]
2008/0011,332 Method and apparatus for cleaning a wafer substrateAbandonedJul 06, 07Jan 17, 08[B08B]
2008/0011,421 Processing chamber having labyrinth sealAbandonedJul 06, 07Jan 17, 08[C23F]
2007/0258,085 Substrate illumination and inspection systemAbandonedMay 02, 06Nov 08, 07[G01N]
2007/0062,647 Method and apparatus for isolative substrate edge area processingAbandonedSep 19, 05Mar 22, 07[H01L, C23F]
2007/0066,076 Substrate processing method and apparatus using a combustion flameAbandonedSep 19, 05Mar 22, 07[H01L]
2005/0205,518 Method for shaping thin films in the near-edge regions of in-process semiconductor substratesAbandonedMay 18, 05Sep 22, 05[H01L, B44C]
6936546 Apparatus for shaping thin films in the near-edge regions of in-process semiconductor substratesExpiredMar 27, 03Aug 30, 05[H01L]
6875076 Polishing machine and methodExpiredJun 17, 02Apr 05, 05[B24B]
6641464 Method and apparatus for polishing the edge of a bonded waferExpiredFeb 21, 03Nov 04, 03[B24B]
6629875 Machine for grinding-polishing of a water edgeExpiredDec 19, 00Oct 07, 03[B24B]
6494775 Wafer carrier having more support ribs and lighter weight and methodExpiredOct 15, 01Dec 17, 02[B24B]
6473987 Method for measuring wafer thicknessExpiredDec 28, 99Nov 05, 02[G01B]
6306016 Wafer notch polishing machine and method of polishing an orientation notch in a waferExpiredAug 03, 00Oct 23, 01[B24B]
6290274 Vacuum system and method for securing a semiconductor wafer in a planar positionExpiredApr 09, 99Sep 18, 01[B25B, B66C]

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