AUGUST TECHNOLOGY CORPORATION

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
7230441 Wafer staging platform for a wafer inspection systemExpiredJul 18, 03Jun 12, 07[G01R]
2006/0012,778 Illuminator for dark field inspectionAbandonedJul 11, 05Jan 19, 06[G01N]
6882415 Confocal 3D inspection system and processExpiredJul 16, 02Apr 19, 05[G01N]
6870609 Confocal 3D inspection system and processExpiredFeb 11, 02Mar 22, 05[G01N]
2005/0052,197 Multi-tool managerAbandonedJul 14, 04Mar 10, 05[G01R]
2005/0038,554 Inspection and metrology module cluster toolAbandonedJul 14, 04Feb 17, 05[G06F]
6820349 End effector alignment tool for substrate handling systemExpiredSep 30, 02Nov 23, 04[G01D]
2004/0179,096 Imaging system using theta-theta coordinate stage and continuous image rotation to compensate for stage rotationAbandonedSep 30, 03Sep 16, 04[H04N]
2004/0109,600 Inspection tool with partial framing camreaAbandonedJul 18, 03Jun 10, 04[G06K]
2004/0102,043 Confocal 3D inspection system and processAbandonedOct 30, 03May 27, 04[H01L]
2004/0096,095 Inspection tool with partial framing/windowing cameraAbandonedJul 18, 03May 20, 04[G06K]
2004/0071,534 Adjustable wafer alignment armAbandonedJul 18, 03Apr 15, 04[B65G]
2004/0060,186 Laser alignment toolAbandonedSep 30, 02Apr 01, 04[G01D]
2003/0220,997 Switched fabric based inspection systemAbandonedApr 25, 03Nov 27, 03[G06F]
2003/0221,041 Sensor with switched fabric interfaceAbandonedApr 25, 03Nov 27, 03[G06F]
6653006 System for fuel cell reformer start-upExpiredOct 29, 01Nov 25, 03[H01M]
2003/0030,794 Confocal 3D inspection system and processAbandonedJul 16, 02Feb 13, 03[G01N]
2003/0025,918 Confocal 3D inspection system and processAbandonedJul 16, 02Feb 06, 03[G01B]
5580163 Focusing light source with flexible mount for multiple light-emitting elementsExpiredJul 20, 94Dec 03, 96[F21V]

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