ASML NETHERLANDS B.V.
Patent Owner
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- 20 2,872 US PATENTS IN FORCE
- 390 US APPLICATIONS PENDING
- Feb 01, 2018 most recent publication
Details
- 2,872 Issued Patents
- 686 Issued in last 3 years
- 353 Published in last 3 years
- 51,524 Total Citation Count
- Sep 22, 1986 Earliest Filing
- 741 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
MATTERS
Rank in Class
Intl Class
Technology
MATTERS
Rank in Class
- No Technologies to Display
Top Patents (by citation)
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Patent #
Title
Filing Date
Issue Date
Intl Class
CITATIONS
5969441
Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device
Oct 10, 97
Oct 19, 99
[G03F, H02K]
705
6208407
Method and apparatus for repetitively projecting a mask pattern on a substrate, using a time-saving height measurement
Jul 13, 98
Mar 27, 01
[G03F]
432
6603130
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses
Apr 17, 00
Aug 05, 03
[H01J]
403
7175940
Method of two dimensional feature model calibration and optimization
Oct 09, 02
Feb 13, 07
[G03F]
225
6114071
Method of fine feature edge tuning with optically-halftoned mask
Apr 06, 98
Sep 05, 00
[G03F]
220
- No Patents to Display
Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2018/0031,977
Device and Method for Processing a Radiation Beam with Coherence
Jul 26, 17
Feb 01, 18
[G03F, G01N]
2018/0031,981
PROCESS VARIABILITY AWARE ADAPTIVE INSPECTION AND METROLOGY
Jan 20, 16
Feb 01, 18
[G06N, G03F]
2018/0024,054
Method of Measuring a Target, Substrate, Metrology Apparatus, and Lithographic Apparatus
Jul 20, 17
Jan 25, 18
[G03F, G01N]
2018/0024,443
DEVICE MANUFACTURING METHOD AND PATTERNING DEVICES FOR USE IN DEVICE MANUFACTURING METHOD
Feb 05, 16
Jan 25, 18
[G03F]
2018/0027,642
APPARATUS FOR AND METHOD OF SOURCE MATERIAL DELIVERY IN A LASER PRODUCED PLASMA EUV LIGHT SOURCE
Sep 06, 17
Jan 25, 18
[G03F, H05G]
2018/0017,881
Method and Apparatus for Design of a Metrology Target
Jul 14, 17
Jan 18, 18
[G03F, G01N]
2018/0011,014
Method and Apparatus for Calculating Electromagnetic Scattering Properties of Finite Periodic Structures
Jul 07, 17
Jan 11, 18
[G01N]
2018/0011,029
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method
Jul 05, 17
Jan 11, 18
[G02F, G01N]
- No Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9879988
Metrology method and apparatus, computer program and lithographic system
Feb 02, 16
Jan 30, 18
[G03B, G03F, G01B]
9869940
Metrology method and apparatus, computer program and lithographic system
Apr 20, 16
Jan 16, 18
[G03F, G01B]
9857694
Estimating deformation of a patterning device and/or a change in its position
Mar 05, 15
Jan 02, 18
[G03B, G03F, G01B]
9857696
Substrate table, a lithographic apparatus and a device manufacturing method
Sep 22, 16
Jan 02, 18
[G03B, G03F]
- No Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2016/0165,709
System and Method for Isolating Gain Elements in a Laser System
ABAN
Dec 05, 14
Jun 09, 16
[H05G]
2016/0018,742
Method of Measuring Overlay Error and a Device Manufacturing Method
ABAN
Sep 28, 15
Jan 21, 16
[G03F]
2015/0124,231
Assembly For Modifying Properties Of A Plurality Of Radiation Beams, A Lithography Apparatus, A Method Of Modifying Properties Of A Plurality Of Radiation Beams And A Device Manufacturing Method
ABAN
May 06, 13
May 07, 15
[G03F]
2015/0124,234
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
ABAN
Mar 19, 13
May 07, 15
[G03F]
2015/0095,858
METHOD, PROGRAM PRODUCT AND APPARATUS FOR PERFORMING DOUBLE EXPOSURE LITHOGRAPHY
ABAN
Dec 08, 14
Apr 02, 15
[G06F]
2014/0346,141
SELF-ASSEMBLABLE POLYMER AND METHODS FOR USE IN LITHOGRAPHY
ABAN
Dec 18, 12
Nov 27, 14
[B05D]
2014/0340,663
Apparatus for Monitoring a Lithographic Patterning Device
ABAN
Aug 21, 12
Nov 20, 14
[G03F]
2014/0293,251
Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method
ABAN
Jun 16, 14
Oct 02, 14
[G03F]
2014/0247,435
RADIATION SOURCE DEVICE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
ABAN
Oct 23, 12
Sep 04, 14
[G03F]
2014/0102,881
METHOD OF AND APPARATUS FOR IN-SITU REPAIR OF REFLECTIVE OPTIC
ABAN
Oct 12, 12
Apr 17, 14
[B44C, B32B]
2014/0002,805
Electrostatic Clamp Apparatus And Lithographic Apparatus
ABAN
Jan 18, 12
Jan 02, 14
[H01L]
2013/0287,968
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
ABAN
Jun 25, 13
Oct 31, 13
[H05H]
2013/0194,562
Lithographic Apparatus and Device Manufacturing Method
ABAN
Sep 13, 11
Aug 01, 13
[G03F]
2013/0162,996
Inspection Method and Apparatus, and Lithographic Apparatus
ABAN
Jun 26, 12
Jun 27, 13
[G03F]
- No Patents to Display
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