ASML NETHERLANDS B.V.

Patent Owner

Watch Compare Add to Portfolio

Stats

Details

Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 1525 3
 
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 919 2
 
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 249 4
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 217 246
 
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 161 64
 
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 144 76
 
 
H05G X-RAY TECHNIQUE 141 4
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 121 233
 
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 90 5
 
 
G01J MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 79 16
  • No Technologies to Display

Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2018/0031,977 Device and Method for Processing a Radiation Beam with Coherence Jul 26, 17 Feb 01, 18 [G03F, G01N]
2018/0031,979 Radiation Source Jan 21, 16 Feb 01, 18 [G02B, H01S, G03F, H05G]
2018/0031,981 PROCESS VARIABILITY AWARE ADAPTIVE INSPECTION AND METROLOGY Jan 20, 16 Feb 01, 18 [G06N, G03F]
2018/0031,982 RADIATION SYSTEM Feb 16, 16 Feb 01, 18 [G02B, G03F]
2018/0034,235 Radiation Source Jan 18, 16 Feb 01, 18 [H01S, G03F, H05G]
2018/0024,054 Method of Measuring a Target, Substrate, Metrology Apparatus, and Lithographic Apparatus Jul 20, 17 Jan 25, 18 [G03F, G01N]
2018/0024,443 DEVICE MANUFACTURING METHOD AND PATTERNING DEVICES FOR USE IN DEVICE MANUFACTURING METHOD Feb 05, 16 Jan 25, 18 [G03F]
2018/0024,446 THERMAL CONDITIONING METHOD Nov 24, 15 Jan 25, 18 [G03F]
2018/0027,642 APPARATUS FOR AND METHOD OF SOURCE MATERIAL DELIVERY IN A LASER PRODUCED PLASMA EUV LIGHT SOURCE Sep 06, 17 Jan 25, 18 [G03F, H05G]
2018/0017,879 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD Jan 26, 16 Jan 18, 18 [G03F]
2018/0017,881 Method and Apparatus for Design of a Metrology Target Jul 14, 17 Jan 18, 18 [G03F, G01N]
2018/0011,014 Method and Apparatus for Calculating Electromagnetic Scattering Properties of Finite Periodic Structures Jul 07, 17 Jan 11, 18 [G01N]
2018/0011,029 Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method Jul 05, 17 Jan 11, 18 [G02F, G01N]
2018/0011,398 METHOD AND APPARATUS FOR RETICLE OPTIMIZATION Jan 20, 16 Jan 11, 18 [G06T, G03F]
2018/0011,407 IMAGE LOG SLOPE (ILS) OPTIMIZATION Feb 09, 16 Jan 11, 18 [G03F]

View all publication…

  • No Publications to Display

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9879988 Metrology method and apparatus, computer program and lithographic system Feb 02, 16 Jan 30, 18 [G03B, G03F, G01B]
9869940 Metrology method and apparatus, computer program and lithographic system Apr 20, 16 Jan 16, 18 [G03F, G01B]
9864271 Imprint lithography Aug 01, 17 Jan 09, 18 [G03F, B05C, B82Y]
9864279 Imprint lithography Jun 14, 11 Jan 09, 18 [G03B, G03F, B29C, B82Y]
9864282 Sensor system for lithography Apr 12, 17 Jan 09, 18 [G03F, G01B]
9857694 Estimating deformation of a patterning device and/or a change in its position Mar 05, 15 Jan 02, 18 [G03B, G03F, G01B]
9857695 Lithographic apparatus and device manufacturing method Aug 29, 16 Jan 02, 18 [G03B, G03F]
9857696 Substrate table, a lithographic apparatus and a device manufacturing method Sep 22, 16 Jan 02, 18 [G03B, G03F]
9857698 Lithographic apparatus and device manufacturing method Mar 19, 15 Jan 02, 18 [G02B, G03F]
9857699 Vacuum system for immersion photolithography Nov 28, 16 Jan 02, 18 [G03B, G03F]

View all Patent…

  • No Patents to Display

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0165,709 System and Method for Isolating Gain Elements in a Laser System ABAN Dec 05, 14 Jun 09, 16 [H05G]
2016/0018,742 Method of Measuring Overlay Error and a Device Manufacturing Method ABAN Sep 28, 15 Jan 21, 16 [G03F]
2015/0261,095 Radiation Source ABAN Sep 06, 12 Sep 17, 15 [G03F]
2015/0264,791 Method and Apparatus for Generating Radiation ABAN Jul 05, 13 Sep 17, 15 [H05G]
2015/0241,797 Reticle Cleaning by Means of Sticky Surface ABAN Jul 30, 13 Aug 27, 15 [B08B, G03F]
2015/0124,231 Assembly For Modifying Properties Of A Plurality Of Radiation Beams, A Lithography Apparatus, A Method Of Modifying Properties Of A Plurality Of Radiation Beams And A Device Manufacturing Method ABAN May 06, 13 May 07, 15 [G03F]
2015/0124,234 SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD ABAN Mar 19, 13 May 07, 15 [G03F]
2015/0095,858 METHOD, PROGRAM PRODUCT AND APPARATUS FOR PERFORMING DOUBLE EXPOSURE LITHOGRAPHY ABAN Dec 08, 14 Apr 02, 15 [G06F]
2015/0034,788 Rotatable Frame For a Lithographic Apparatus ABAN Jan 30, 13 Feb 05, 15 [G03F]
2014/0346,141 SELF-ASSEMBLABLE POLYMER AND METHODS FOR USE IN LITHOGRAPHY ABAN Dec 18, 12 Nov 27, 14 [B05D]
2014/0340,663 Apparatus for Monitoring a Lithographic Patterning Device ABAN Aug 21, 12 Nov 20, 14 [G03F]
2014/0293,251 Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method ABAN Jun 16, 14 Oct 02, 14 [G03F]
2014/0247,435 RADIATION SOURCE DEVICE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD ABAN Oct 23, 12 Sep 04, 14 [G03F]
2014/0218,706 RADIATION SOURCE AND LITHOGRAPHIC APPARATUS ABAN Jul 27, 12 Aug 07, 14 [G03F, H05G]
2014/0199,634 Method of Measuring a Characteristic ABAN Mar 14, 14 Jul 17, 14 [G03F]
2014/0102,881 METHOD OF AND APPARATUS FOR IN-SITU REPAIR OF REFLECTIVE OPTIC ABAN Oct 12, 12 Apr 17, 14 [B44C, B32B]
2014/0002,805 Electrostatic Clamp Apparatus And Lithographic Apparatus ABAN Jan 18, 12 Jan 02, 14 [H01L]
2013/0287,968 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD ABAN Jun 25, 13 Oct 31, 13 [H05H]
2013/0194,562 Lithographic Apparatus and Device Manufacturing Method ABAN Sep 13, 11 Aug 01, 13 [G03F]
2013/0162,996 Inspection Method and Apparatus, and Lithographic Apparatus ABAN Jun 26, 12 Jun 27, 13 [G03F]

View all Patent…

  • No Patents to Display

Top Inventors for This Owner

We are sorry but your current selection exceeds the maximum number of watches () for this membership level. Upgrade to our Level for up to watches!

Owner Watch
ASML NETHERLANDS B.V.
CANCEL
UPGRADE MEMBERSHIP CANCEL

We are sorry but your current selection exceeds the maximum number of comparisons () for this membership level. Upgrade to our Level for up to comparisons!

UPGRADE MEMBERSHIP CANCEL

We are sorry but your current selection exceeds the maximum number of portfolios () for this membership level. Upgrade to our Level for up to portfolios!

UPGRADE MEMBERSHIP CANCEL

We are sorry but your current selection exceeds the maximum number of patents allowed in portfolios () for this membership level. Upgrade to our Level for up to patents!

UPGRADE MEMBERSHIP CANCEL