ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- May 16, 2013 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 545 Total Citation Count
- Feb 23, 2006 Earliest Filing
- 6 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
- No Technology to Display
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Recent Publications
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Recent Patents
- No Recent Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2013/0118,405 FLUID COOLED SHOWERHEAD WITH POST INJECTION MIXINGAbandonedDec 26, 11May 16, 13[C23C, B23P, B05B]
2011/0030,900 PLASMA CHAMBER HAVING SWITCHABLE BIAS POWER AND A SWITCHABLE FREQUENCY RF MATCH NETWORK THEREFORAbandonedAug 05, 10Feb 10, 11[H03K, C23F]
2010/0271,745 ELECTROSTATIC CHUCK AND BASE FOR PLASMA REACTOR HAVING IMPROVED WAFER ETCH RATEAbandonedJul 14, 09Oct 28, 10[H01L, C23F, H05K]
2008/0128,087 HIGH FREQUENCY POWER SUPPLY DEVICE AND HIGH FREQUENCY POWER SUPPLYING METHODAbandonedNov 21, 07Jun 05, 08[B05C, H02M, C23F]
2007/0166,459 Assembly and method for delivering a reactant material onto a substrateAbandonedFeb 23, 06Jul 19, 07[C23C]
2007/0032,097 Method and apparatus for processing semiconductor work piecesAbandonedMay 24, 06Feb 08, 07[H01L]
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