ADIXEN VACUUM PRODUCTS
Patent Owner
Stats
- 17 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Dec 12, 2017 most recent publication
Details
- 17 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 503 Total Citation Count
- Mar 17, 2006 Earliest Filing
- 6 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9841345 Detection method and facility for checking sealed products for leaksJul 23, 13Dec 12, 17[G01J, G01M]
9816974 Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressureNov 29, 13Nov 14, 17[H01L, G01N]
9810617 Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressureNov 29, 13Nov 07, 17[H01L, G01N]
9779972 Method and device for controlling the manufacture of semiconductor by measuring contaminationDec 16, 10Oct 03, 17[H01L, B08B, B01L, G06F]
9558969 Method and device for pumping of a process chamberJul 15, 13Jan 31, 17[H01L, B08B, F04B, F04C, F04F]
9534609 Method for predicting a rotation fault in the rotor of a vacuum pump, and associated pumping deviceJun 24, 10Jan 03, 17[G01H, G05B, F04B, F04D]
9175688 Vacuum pumping system having an ejector and check valveOct 27, 10Nov 03, 15[F04C, F04D, F04F]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2013/0152,977 Method And Device for The Depollution Of A Pelliculated ReticleAbandonedSep 06, 11Jun 20, 13[B08B]
2012/0153,360 METHOD AND DEVICE FOR REGENERATING A HYDROGEN SENSORAbandonedDec 16, 11Jun 21, 12[H01L]
2012/0090,382 DEVICE AND METHOD FOR ANALYSING GAS AND ASSOCIATED MEASUREMENT STATIONAbandonedJun 11, 10Apr 19, 12[G01N]
2012/0024,394 METHOD FOR LOWERING THE PRESSURE IN A LOAD LOCK AND ASSOCIATED EQUIPMENTAbandonedDec 18, 09Feb 02, 12[F15D]
Top Inventors for This Owner
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