ADE Corporation

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS1386
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 11195
 
  
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 5154
 
  
 
B25J MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES 454
 
  
 
G06F ELECTRIC DIGITAL DATA PROCESSING 3444
 
  
 
G08C TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS 253
 
  
 
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 166
 
  
 
G01M TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR166
 
  
 
G06K RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS 1197
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1361

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8497984 System and method for inspection of a workpiece surface using multiple scattered light collectorsDec 17, 05Jul 30, 13[G01N]
7623227 System and method for inspecting a workpiece surface using polarization of scattered lightDec 17, 05Nov 24, 09[G01N]
7605913 System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpieceDec 17, 05Oct 20, 09[G01N]
7557910 System and method for controlling a beam source in a workpiece surface inspection systemDec 17, 05Jul 07, 09[G01N]
7505125 System and method for signal processing for a workpiece surface inspection systemDec 17, 05Mar 17, 09[G01N]
7302360 Defect size projectionDec 29, 05Nov 27, 07[G01N]
7286218 System and method for inspecting a workpiece surface using surface structure spatial frequenciesDec 17, 05Oct 23, 07[G01N]
7184928 Extended defect sizingOct 22, 04Feb 27, 07[G06F]
7175214 Wafer gripping fingers to minimize distortionJun 24, 04Feb 13, 07[B25J]
7136519 Specimen topography reconstructionDec 22, 00Nov 14, 06[G06K]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
7417722 System and method for controlling light scattered from a workpiece surface in a surface inspection systemExpiredDec 17, 05Aug 26, 08[G01N]
7346883 System and method for integrated data transfer, archiving and purging of semiconductor wafer dataExpiredJul 08, 05Mar 18, 08[G06F]
7343583 System and method for searching for patterns of semiconductor wafer features in semiconductor wafer dataExpiredJul 08, 05Mar 11, 08[G06F]
7280200 Detection of a wafer edge using collimated lightExpiredJul 15, 04Oct 09, 07[G01N]
2006/0192,949 System and method for inspecting a workpiece surface by analyzing scattered light in a back quartersphere region above the workpieceAbandonedDec 17, 05Aug 31, 06[G01N]
2006/0192,950 System and method for inspecting a workpiece surface using combinations of light collectorsAbandonedDec 17, 05Aug 31, 06[G01N]
2006/0005,413 Work piece positioning apparatusAbandonedJul 09, 04Jan 12, 06[B23Q]
2006/0009,943 Method and system for managing, analyzing and automating data in the production of semiconductor wafers and for monitoring the production processAbandonedJul 08, 05Jan 12, 06[G01M]
6954269 Ring chuck to hold 200 and 300 mm waferExpiredJan 21, 03Oct 11, 05[G01N]
2004/0258,295 Method and system for classifying defects occurring at a surface of a substrate using graphical representation of multi-channel dataAbandonedJun 10, 04Dec 23, 04[G06K]
2004/0252,879 Method and system for analyzing and tracking defects among a plurality of substrates such as silicon wafersAbandonedJun 10, 04Dec 16, 04[G01N, G06K]
6760100 Method and apparatus for classifying defects occurring at or near a surface of a smooth substrateExpiredMar 12, 01Jul 06, 04[G01N]
6621581 Method and apparatus for mapping surface topography of a substrateExpiredOct 15, 99Sep 16, 03[G01B]
6556941 Separation of periodic and non-periodic signal componentsExpiredOct 29, 01Apr 29, 03[H02P]
6275770 Method to remove station-induced error pattern from measured object characteristics and compensate the measured object characteristics with the errorExpiredMay 27, 99Aug 14, 01[G01N]
5708368 Method and apparatus for emulation of a linear variable differential transducer by a capacitive gaging systemExpiredMar 07, 96Jan 13, 98[G01R]
5102280 Robot prealignerExpiredMar 07, 89Apr 07, 92[B65G]
4958129 Prealigner probeExpiredMar 07, 89Sep 18, 90[G01R]
4931962 Fixture and nonrepeatable error compensation systemExpiredMay 13, 88Jun 05, 90[G01C, G01B]
4918376 A.C. capacitive gauging systemExpiredApr 17, 90Apr 17, 90[G01R]

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